Exploration of the Oxidation Rate of Silicon Wafers via Simulation

By Tanya Faltens

Purdue University

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Abstract

This teaching resource is designed for instructors who would like to introduce exploration through simulation into their lessons on silicon oxidation.  Step-by-step instructions are provided for running the process lab oxidation simulation, and guiding questions are provided that should help students discover important trends in the oxidation rate when different process parameters are changed.

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Researchers should cite this work as follows:

  • Tanya Faltens (2014), "Exploration of the Oxidation Rate of Silicon Wafers via Simulation," https://nanohub.org/resources/21669.

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