Vistec VB6 EBL Dose Pattern Generator

By Sajid M Choudhury

Purdue University

This tool generates a pattern for the Vistec VB6 EBL. This tool makes it easier to generate text for the serpentine pattern of VB6 dose.

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Version 0.1 - published on 11 Dec 2015

doi:10.4231/D3MK6592X cite this

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Abstract

This tool generates a pattern for the Vistec VB6 EBL. This tool makes it easier to generate text for the serpentine pattern of VB6 dose.

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Cite this work

Researchers should cite this work as follows:

  • Sajid M Choudhury (2015), "Vistec VB6 EBL Dose Pattern Generator," https://nanohub.org/resources/vb6dosenumber. (DOI: 10.4231/D3MK6592X).

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Tags

  1. Electron beam lithography
  2. lithography
  3. nano fabrication
  4. patterning
  5. processing