powered by nanoHUB.org
Toward Improving the Precision of Nanoscale Force-Displacement Measurements
  • Toward Improving the Precision of Nanoscale Force-Displacement Measurements 1. Toward Improving the Precision… 0
    00:00/00:00
  • Overview of the presentation 2. Overview of the presentation 39.039039039039039
    00:00/00:00
  • Nanotechnology has great potential 3. Nanotechnology has great poten… 57.357357357357358
    00:00/00:00
  • Technological bottleneck. Large uncertainties make it difficult to: 4. Technological bottleneck. Larg… 87.187187187187192
    00:00/00:00
  • Engineering of micro/nanoscale systems 5. Engineering of micro/nanoscale… 169.73640306973641
    00:00/00:00
  • Measuring forces. Tangible phenomena 6. Measuring forces. Tangible phe… 258.958958958959
    00:00/00:00
  • Atomic Force Microscope (AFM): Concept 7. Atomic Force Microscope (AFM):… 388.25492158825494
    00:00/00:00
  • Components of an AFM. 8. Components of an AFM. 437.07040373707042
    00:00/00:00
  • Common methods to calibrate AFM cantilever 9. Common methods to calibrate AF… 452.78611945278612
    00:00/00:00
  • AFM calibration: The thermal method 10. AFM calibration: The thermal m… 468.83550216883555
    00:00/00:00
  • Overview of the presentation 11. Overview of the presentation 553.65365365365369
    00:00/00:00
  • Predicted performance vs. True performance 12. Predicted performance vs. True… 559.5595595595596
    00:00/00:00
  • Dw affects width, gap, length; mass, damping, stiffness; resistance, capacitance; etc. 13. Dw affects width, gap, length;… 603.06973640306978
    00:00/00:00
  • Resonator stiffness kx 14. Resonator stiffness kx 625.658992325659
    00:00/00:00
  • Stiffness is a function of several unknowns 15. Stiffness is a function of sev… 643.00967634300969
    00:00/00:00
  • Relative error in stiffness due to Dw 16. Relative error in stiffness du… 673.03970637303973
    00:00/00:00
  • Relative error in mass due to Dw 17. Relative error in mass due to … 699.36603269936609
    00:00/00:00
  • Relative error in resonance due to Dw 18. Relative error in resonance du… 713.04637971304646
    00:00/00:00
  • Measurements of Young's modulus E 19. Measurements of Young's modulu… 720.72072072072069
    00:00/00:00
  • Relative error in stiffness due to both Dw & DE 20. Relative error in stiffness du… 740.80747414080747
    00:00/00:00
  • Overview of the presentation 21. Overview of the presentation 784.15081748415082
    00:00/00:00
  • EMM: Geometric, dynamic, and material properties as functions of electrical measurands f(DC, DV, and or w) 22. EMM: Geometric, dynamic, and m… 798.16483149816486
    00:00/00:00
  • Electro Micro Metrology (EMM) vs. convention 23. Electro Micro Metrology (EMM) … 829.295962629296
    00:00/00:00
  • A simple EMM structure (not unique) 24. A simple EMM structure (not un… 894.16082749416091
    00:00/00:00
  • Layout versus fabrication 25. Layout versus fabrication 915.14848181514856
    00:00/00:00
  • Close-up of a fabricated comb finger & gap 26. Close-up of a fabricated comb … 943.57691024357689
    00:00/00:00
  • Radius of compliance. The anchor is NOT rigid 27. Radius of compliance. The anch… 967.76776776776785
    00:00/00:00
  • Reducing the effects of filet & anchor compliance 28. Reducing the effects of filet … 991.35802469135808
    00:00/00:00
  • Width by SEM, severed cross section 29. Width by SEM, severed cross se… 1005.538872205539
    00:00/00:00
  • Fabrication vs. effective property extraction 30. Fabrication vs. effective prop… 1036.036036036036
    00:00/00:00
  • Identical comb voltages identical forces 31. Identical comb voltages identi… 1083.1831831831833
    00:00/00:00
  • Static equilibrium by Hooke's law (small deflection) 32. Static equilibrium by Hooke's … 1129.7630964297632
    00:00/00:00
  • Deflections are not identical 33. Deflections are not identical 1139.83983983984
    00:00/00:00
  • And changes in capacitances are not equal 34. And changes in capacitances ar… 1183.0497163830498
    00:00/00:00
  • Forces due to changes in capacitance 35. Forces due to changes in capac… 1207.5408742075408
    00:00/00:00
  • Comb drives have fringing fields, misalignments, strain gradients, etc. 36. Comb drives have fringing fiel… 1228.2282282282283
    00:00/00:00
  • Partial differential ratios = difference ratios 37. Partial differential ratios = … 1258.2916249582918
    00:00/00:00
  • What we get from mechanics 38. What we get from mechanics 1278.0447113780447
    00:00/00:00
  • What we get from electrostatics 39. What we get from electrostatic… 1311.0777444110779
    00:00/00:00
  • Coupling mechanics with electrostatics 40. Coupling mechanics with electr… 1330.9642976309644
    00:00/00:00
  • The difference between layout and fabrication 41. The difference between layout … 1365.4988321654989
    00:00/00:00
  • Planar geometries become available at once! 42. Planar geometries become avail… 1376.71004337671
    00:00/00:00
  • What about parasitic capacitance Cp? 43. What about parasitic capacitan… 1388.2882882882884
    00:00/00:00
  • What about uncertainty in capacitance dC? 44. What about uncertainty in capa… 1424.5245245245246
    00:00/00:00
  • Sensitivity analysis 45. Sensitivity analysis 1439.7731064397731
    00:00/00:00
  • Expectations for geometric extraction 46. Expectations for geometric ext… 1492.0253586920255
    00:00/00:00
  • Expectations for geometric precision 47. Expectations for geometric pre… 1549.5161828495163
    00:00/00:00
  • Expectations for geometric precision 48. Expectations for geometric pre… 1583.5835835835837
    00:00/00:00
  • Measuring comb drive force 49. Measuring comb drive force 1619.1524858191526
    00:00/00:00
  • Measuring comb drive force 50. Measuring comb drive force 1645.7123790457124
    00:00/00:00
  • Sensitivity analysis: F versus uncertainty in e 51. Sensitivity analysis: F versus… 1666.0994327660994
    00:00/00:00
  • Sensitivity analysis: F versus uncertainty in e 52. Sensitivity analysis: F versus… 1675.5422088755422
    00:00/00:00
  • Expectations for force precision 53. Expectations for force precisi… 1687.5875875875877
    00:00/00:00
  • Force: scaling of phenomena 54. Force: scaling of phenomena 1710.0767434100769
    00:00/00:00
  • Position sensing / manipulation 55. Position sensing / manipulatio… 1726.1594928261595
    00:00/00:00
  • Application 1: Calibration / Bending 56. Application 1: Calibration / B… 1753.6536536536537
    00:00/00:00
  • Application 2: Calibration / Torsion / Tribology 57. Application 2: Calibration / T… 1788.154821488155
    00:00/00:00
  • Application 3: AFM-on-a-chip 58. Application 3: AFM-on-a-chip 1805.8391725058393
    00:00/00:00
  • Summary 59. Summary 1823.8238238238239
    00:00/00:00
Fullscreen Pop Out