Lab Exercise: Ellipsometry

By NACK Network

Nanotechnology Applications and Career Knowledge (NACK) Network

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Abstract

The objective of this lab is to evaluate the ellipsometer. Multiple ellipsometers will be presented and compared. The procedural operation and working mechanisms of the ellipsometer will both be discussed.

Cite this work

Researchers should cite this work as follows:

  • NACK Network (2017), "Lab Exercise: Ellipsometry," https://nanohub.org/resources/25755.

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Tags

  1. ATE Centers
  2. characterization
  3. dielectric properties
  4. ellipsometry
  5. lab
  6. NACK Network
  7. NCN Group - Characterization and Metrology
  8. thin films