Learning Module: Deposition Processes Overview for Microsystems - Instructor Guides

By Southwest Center for Microsystems Education (SCME)

Southwest Center for Microsystems Education, University of New Mexico, Albuquerque, NM

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Abstract

This learning module is an introduction to the common processes used to deposit thin films for the fabrication of micro-size devices.  Thermal oxidation and several types of deposition are discussed.  Activities provide further exploration into these processes as well as the properties and applications of the thin films deposited.

This learning modules contains the following.

  • Learning Module Map (Suggested outline for instructor)
  • Pre-Test:  Knowledge Probe
  • Reading: Deposition Overview for Microsystems
  • Presentation:  Deposition Overview
  • Activity:  Terminology
  • Activity:  Science of Thin Films
  • Presentation:  Science of Thin Films Activity
  • Activity:  Deposition Research
  • Assessment

Instructors: please create a nanoHUB account and then request SCME Group membership in order to obtain Instructor Guides and editable slides for your personal classroom use.

Student materials for this learning module are available here.

 

Submitter

MJ Willis

Southwest Center for Microsystems Education, University of New Mexico, Albuquerque, NM

Tags

  1. sputter deposition
  2. oxidation
  3. chemical vapor deposition
  4. NEMS/MEMS
  5. MEMS
  6. Deposition processes
  7. thin films
  8. K-12
  9. light interference
  10. SCME