Xianfan Xu is a Professor of Mechanical Engineering at Purdue University. He obtained his M.S. (1991) and Ph.D. (1994) degrees in Mechanical Engineering from the University of California, Berkeley. His current research is on laser based micro- and nano-engineering, including nanoscale laser machining/lithography, development of optical MEMS and NEMS, and near field nano-optics.

NCN@Purdue Student Leadership Team
Network for Computational Nanotechnology
The Institute for Nanoelectronics and Computing

Researchers should cite this work as follows:

• Xianfan Xu (2007), "Nanoscale Antenna Apertures," https://nanohub.org/resources/2642.

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1. lithography
2. nanooptics
3. nanophotonics
4. processing
5. tutorial