You must login before you can run this tool.
tsuprem4
TSUPREM-4 is a computer program for simulating the processing steps used in the manufacture of silicon integrated circuits and discrete devices.
Version 2016-03 - published on 31 Jan 2023
doi:10.21981/G7SH-5D85 cite this
This tool is closed source.
Category
Published on
Abstract
TSUPREM-4 is a computer program for simulating the processing steps used in the manufacture of silicon integrated circuits and discrete devices. The types of processing steps modeled by the current version of the program include ion implantation, inert ambient drive-in, silicon and polysilicon oxidation and silicidation, epitaxial growth, and low temperature deposition and etching of various materials.
Because of the way this software is licensed, it is available only to users on the West Lafayette campus of Purdue University. Note that you must use a network connection on campus, or else you will get an "access denied" message.
Powered by
TSUPREM-4 licensed from Synopsys, Inc.
Credits
User interface for launching simulations and analyzing results created by Steve Clark.
Cite this work
Researchers should cite this work as follows: