Focused Ion Beam (FIB): “Seeing” and “Processing” at the Nano-Scale

By Wook Jun Nam1; NACK Network2

1. Engineering Science and Mechanics, Pennsylvania State University, State College, PA 2. Center for Nanotechnology Education and Utilization, Pennsylvania State University, State College, PA

Published on

Abstract

Outline

  • FIB Overview
  • FIB Operation
  • FIB Applications

Sponsored by

The Nanotechnology Applications and Career Knowledge (NACK) Network

Funded, in part, by a grant from the National Science Foundation. DUE 1205105

Cite this work

Researchers should cite this work as follows:

  • Wook Jun Nam, NACK Network (2018), "Focused Ion Beam (FIB): “Seeing” and “Processing” at the Nano-Scale," https://nanohub.org/resources/28989.

    BibTex | EndNote

Tags

Focused Ion Beam (FIB): “Seeing” and “Processing” at the Nano-Scale
  • Focused Ion Beam (FIB): 1. Focused Ion Beam (FIB): "Seein… 0
    00:00/00:00
  • Outline 2. Outline 33.166499833166505
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  • FIB overview 3. FIB overview 58.2248915582249
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  • Ebeam vs. Ion Beam 4. Ebeam vs. Ion Beam 58.858858858858859
    00:00/00:00
  • Applications of Focused Ion Beam (FIB) 5. Applications of Focused Ion Be… 102.53586920253588
    00:00/00:00
  • Typical Configuration of FIB 6. Typical Configuration of FIB 200.16683350016683
    00:00/00:00
  • FEI Quanta 3D system 7. FEI Quanta 3D system 238.9723056389723
    00:00/00:00
  • FEI Quanta 3D system 8. FEI Quanta 3D system 271.40473807140472
    00:00/00:00
  • FEI Quanta 3D system 9. FEI Quanta 3D system 307.60760760760763
    00:00/00:00
  • Typical Configuration of FIB (continued): 52 degree tilted 10. Typical Configuration of FIB (… 365.56556556556558
    00:00/00:00
  • Typical Configuration of FIB (continued): User Interface 11. Typical Configuration of FIB (… 375.84250917584251
    00:00/00:00
  • Typical Configuration of FIB (continued): User Interface 12. Typical Configuration of FIB (… 421.32132132132136
    00:00/00:00
  • FIB operation 13. FIB operation 442.14214214214218
    00:00/00:00
  • All equipment is pointed to one central spot !! 14. All equipment is pointed to on… 446.98031364698033
    00:00/00:00
  • What is Eucentric Point ? (continued) 15. What is Eucentric Point ? (con… 532.06539873206543
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  • Eucentric Point (continued) 16. Eucentric Point (continued) 549.54954954954962
    00:00/00:00
  • Eucentric Point (continued) – 52 degree tilted Images 17. Eucentric Point (continued) … 614.24758091424758
    00:00/00:00
  • Eucentric Point (continued) – 52 degree tilted Images 18. Eucentric Point (continued) … 661.327994661328
    00:00/00:00
  • Eucentric Point Finding Steps 19. Eucentric Point Finding Steps 675.47547547547549
    00:00/00:00
  • Eucentric Point Finding Steps (continued) 20. Eucentric Point Finding Steps … 676.74341007674343
    00:00/00:00
  • Fine Alignment of Ion Beam 21. Fine Alignment of Ion Beam 677.27727727727734
    00:00/00:00
  • We just set up the sample to face the Ion beam 22. We just set up the sample to f… 826.19285952619293
    00:00/00:00
  • Ion Beam Operation 23. Ion Beam Operation 857.29062395729068
    00:00/00:00
  • Film Deposition (Pt) 24. Film Deposition (Pt) 858.5251918585252
    00:00/00:00
  • Film Deposition (Pt)-continued 25. Film Deposition (Pt)-continued 859.0256923590257
    00:00/00:00
  • Film Deposition (Pt)- Find Deposition Spot 26. Film Deposition (Pt)- Find Dep… 925.62562562562562
    00:00/00:00
  • Film Deposition (Pt)-Warm up the Pt Source 27. Film Deposition (Pt)-Warm up t… 937.90457123790463
    00:00/00:00
  • Film Deposition (Pt)-Insert Pt Gas Injector 28. Film Deposition (Pt)-Insert Pt… 949.28261594928267
    00:00/00:00
  • Film Deposition (Pt)-Define the Deposition Area 29. Film Deposition (Pt)-Define th… 968.0680680680681
    00:00/00:00
  • Film Deposition (Pt)- Deposition Condition Setup 30. Film Deposition (Pt)- Depositi… 1005.9392726059393
    00:00/00:00
  • Film Deposition (Pt)-Start Deposition 31. Film Deposition (Pt)-Start Dep… 1035.0016683350018
    00:00/00:00
  • Film Deposition (Pt)- Deposition Progress Check 32. Film Deposition (Pt)- Depositi… 1036.9035702369035
    00:00/00:00
  • Film Deposition (Pt)- Images of Deposited Film 33. Film Deposition (Pt)- Images o… 1087.6543209876543
    00:00/00:00
  • Ion Milling 34. Ion Milling 1124.9249249249249
    00:00/00:00
  • Ion Milling: Basic Step 35. Ion Milling: Basic Step 1133.0997664330998
    00:00/00:00
  • Ion Milling: Ion Beam Setup 36. Ion Milling: Ion Beam Setup 1158.8254921588255
    00:00/00:00
  • Ion Milling: Milling 37. Ion Milling: Milling 1196.3963963963965
    00:00/00:00
  • Ion Milling: Progress Check 38. Ion Milling: Progress Check 1197.6976976976978
    00:00/00:00
  • Ion Milling: Cleaning Cut 39. Ion Milling: Cleaning Cut 1270.2702702702704
    00:00/00:00
  • Ion Milling: Cleaning Cut 40. Ion Milling: Cleaning Cut 1289.4227560894228
    00:00/00:00
  • Ion Milling: SEM Image of the Cut 41. Ion Milling: SEM Image of the … 1292.9596262929597
    00:00/00:00
  • FIB Grain Contrast 42. FIB Grain Contrast 1373.0063396730063
    00:00/00:00
  • FIB Grain Images: W filament 43. FIB Grain Images: W filament 1479.1791791791793
    00:00/00:00
  • FIB Applications 44. FIB Applications 1529.8631965298632
    00:00/00:00
  • Electrode Formation for Nanowires 45. Electrode Formation for Nanowi… 1537.8044711378045
    00:00/00:00
  • Cross Sectional TEM Sample Preparation 46. Cross Sectional TEM Sample Pre… 1743.8772105438773
    00:00/00:00
  • 47. 2698.6319652986322
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