ME 290R Lecture 6.1: Nanoimprint Lithography - Machine Design I

By Taylor, Hayden

Mechanical Engineering, University of California at Berkeley, Berkeley, CA

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Researchers should cite this work as follows:

  • Taylor, Hayden (2019), "ME 290R Lecture 6.1: Nanoimprint Lithography - Machine Design I," https://nanohub.org/resources/30336.

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Tags

  1. lithography
  2. nano imprinting
  3. nanoimprint lithography
  4. nanomanufacturing
  5. nanoMFG Node
  6. processing