Chemical Vapor Deposition Reactor Design

By Adam Powell

Mechanical Engineering, Worcester Polytechnic Institute, Worcester, MA

Download (PDF)

Additional materials available (5)

Category

Teaching Materials

Published on

Abstract

Sketch the streamlines in a tube CVD reactor and propose a design change which would lead to more uniform deposition.

Assignment solution time: 1 hour

Credits

Copyright 2003 Adam C. Powell, IV,
Licensed under MIT Open CourseWare

Cite this work

Researchers should cite this work as follows:

  • Adam Powell (2019), "Chemical Vapor Deposition Reactor Design," https://nanohub.org/resources/30644.

    BibTex | EndNote

Time

Tags

  1. boundary layers
  2. chemical vapor deposition (CVD)
  3. education
  4. educational problem set
  5. electronic materials
  6. forced convection
  7. junior level
  8. materials science
  9. Transport Phenomena Archive