Radiation in facing Target Sputtering

By Adam Powell

Mechanical Engineering, Worcester Polytechnic Institute, Worcester, MA

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Abstract

Calculate radiation viewfactors and rates of heat transfer between plates in a facing target sputtering apparatus for depositing yttrium-barium-copper oxide superconducting thin films.

Assignment solution time: 1 hour

Credits

Copyright 1999, 2000, 2001, 2002 Adam C. Powell, IV
Licensed under MIT Open CourseWare.

Cite this work

Researchers should cite this work as follows:

  • Adam Powell (2019), "Radiation in facing Target Sputtering," https://nanohub.org/resources/31044.

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  1. education
  2. educational problem set
  3. electronic materials
  4. junior level
  5. materials science
  6. radiation
  7. Transport Phenomena Archive