ECE 595AL Lecture 10.2: Nanoimprint Lithography - Risidual Layer After Nanoimprint

By Minghao Qi

Electrical and Computer Engineering, Purdue University, West Lafayette, IN

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Researchers should cite this work as follows:

  • Minghao Qi (2020), "ECE 595AL Lecture 10.2: Nanoimprint Lithography - Risidual Layer After Nanoimprint," https://nanohub.org/resources/32816.

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EE 224, Purdue University, West Lafayette, IN