ECE 595AL Lecture 12.3: (Directed) Self-Assembly - Block Copolymer Lithography

By Minghao Qi

Electrical and Computer Engineering, Purdue University, West Lafayette, IN

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  • Minghao Qi (2020), "ECE 595AL Lecture 12.3: (Directed) Self-Assembly - Block Copolymer Lithography," https://nanohub.org/resources/32825.

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