The foundations of Chemical Vapor Deposition (CVD) will be reviewed, with a focus on Low Pressure CVD (LPCVD), typical deposition system design, and the two modes of deposition. These modes will examine thin films, known as 2-dimensional nanoscale materials, and nanowires, known as 1-dimensional nanoscale materials. A lab tour with a look at a working CVD system may be included.

Center for Nanotechnology Education and Utilization (CNEU)

Researchers should cite this work as follows:

• Terry Kuzma, NACK Network (2022), "Chemical Vapor Deposition 2 Modes, 1D, 2D," https://nanohub.org/resources/35788.

  BibTex | EndNote

1. ATE Centers
2. chemical vapor deposition (CVD)
3. materials science
4. NACK Network
5. nanowires