The tool is currently designed to simulate Tang's comb-drive. All the inputs such as geometric size, material properties, actuation information are parameters transparent to users. There are two different simulations can be done: static analysis and (up to two parameters) sweep analysis. In the static analysis, the original and actuated 3D model pictures are provided. A table of all the deflection value of the center point as well as the netlist used to created the model in SUGAR are also downloaded. In the sweep test, a family of sweeping curves is plotted and all the numerical values are offered as a text file.

This tool is based on the work of LI, Fengyuan (Thomas) and CLARK, Jason.

Researchers should cite this work as follows:

• Fengyuan Li, Jason Clark (2014), "MEMS Resonator - Tang," https://nanohub.org/resources/sugartangcd. (DOI: 10.4231/D3PG1HP54).

  BibTex | EndNote

1. actuators
2. CAD
3. CAE
4. MEMS
5. Nano Electro-Mechanical Systems (NEMS)
6. NCN Group - NEMS/MEMS
7. NEMS/MEMS
8. SUGAR