• STM – early work
• Arranging atoms with a tip
• Local Oxidation Lithography (Electrochemical)
• Dip Pen Lithography
• Nanografting

• Garcia, Martinez and Martinez, Nano-chemistry and scanning probe nanolithographies, Chem. Soc. Rev. 35, 29-38 (2006)
• Rosa and Liang, Atomic force microscope nanolithography: dip-pen, nanoshaving, nanografting, tapping mode, electrochemical and thermal nanolithography, J. Phys. Condens. Matter 21, 483001 (2009)

Researchers should cite this work as follows:

• Ron Reifenberger (2009), "ME 597 Lecture 26: Scanning Probe Nanolithography," https://nanohub.org/resources/7933.

  BibTex | EndNote

1. course lecture
2. lithography
3. materials science
4. nanolithography
5. scanning probe microscopy (SPM)