Support Options

Submit a Support Ticket


Illinois ME 498 Introduction of Nano Science and Technology, Lecture 26: Nanomanufacturing 1: Semiconductor Manufacturing

By Nick Fang1, Omar Sobh1

1. University of Illinois at Urbana-Champaign

View Presentation (SWF)

Licensed according to this deed.

Published on


Nanomaterials and Devices for Solar Energy


  • From Si crystals to Wafers
  • From Wafers to Chips
  • Photolithography: Definitions
  • Optical Lithography
  • Multi-Photon Lithography
  • E-Beam Lithography
  • Imprinting Lithography
  • Scanning probe lithography
  • Additive Processes
  • Thermal Oxidation
  • Diffusion
  • Thermal Evaporation
  • Evaporation: Shadowing
  • Planetary Evaporator
  • Subtractive Process
  • Etching
  • Etch Selectivity
  • Anisotropic Wet Etching
  • Dry Etching Profiles
  • Process Flow
  • Processing Steps in Final Packaging
  • Yield issue in processing
  • Tags, a resource for nanoscience and nanotechnology, is supported by the National Science Foundation and other funding agencies. Any opinions, findings, and conclusions or recommendations expressed in this material are those of the author(s) and do not necessarily reflect the views of the National Science Foundation.