Illinois ME 498 Introduction of Nano Science and Technology, Lecture 26: Nanomanufacturing 1: Semiconductor Manufacturing

By Nick Fang1; Omar Sobh1

1. University of Illinois at Urbana-Champaign

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Abstract

Nanomaterials and Devices for Solar Energy

Topics:

  • From Si crystals to Wafers
  • From Wafers to Chips
  • Photolithography: Definitions
  • Optical Lithography
  • Multi-Photon Lithography
  • E-Beam Lithography
  • Imprinting Lithography
  • Scanning probe lithography
  • Additive Processes
  • Thermal Oxidation
  • Diffusion
  • Thermal Evaporation
  • Evaporation: Shadowing
  • Planetary Evaporator
  • Subtractive Process
  • Etching
  • Etch Selectivity
  • Anisotropic Wet Etching
  • Dry Etching Profiles
  • Process Flow
  • Processing Steps in Final Packaging
  • Yield issue in processing

    • Cite this work

    Researchers should cite this work as follows:

    • Nick Fang, Omar Sobh (2010), "Illinois ME 498 Introduction of Nano Science and Technology, Lecture 26: Nanomanufacturing 1: Semiconductor Manufacturing," https://nanohub.org/resources/8132.

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    Tags

    1. course lecture
    2. Illinois
    3. nanophotonics
    4. processing
    5. Si
    6. wafers