Silvaco TCAD

By eric guichard1

1. Silvaco

SILVACO Semiconductor Process and Device Simulation for Educational Purposes Only, see License below.

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Version 1.0 - published on 28 Sep 2022

doi:10.21981/1DAE-YC76 cite this

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Abstract

Semiconductor Process and Device Simulation

TCAD Software Solutions are key to develop new semiconductor processes and devices, as part of the R&D cycles

Benefits of TCAD

 

Reduce Development Costs

  • Reduce the time and manufacturing cycles spent to develop semiconductor technologies
  • ITRS roadmaps indicates that TCAD simulation can reduce the costs during development cycles by ~30%

Visualize Internal Physical Processes

  • Using simulation, you can see ‘inside” the device. Experimental measurements tell you what happens, but not why it happens. TCAD can tell you why. For example:
    • Reverse voltage characterization on a power device tells you what happens at high reverse biases. The  device experiences reverse breakdown at a specific voltage
    • A TCAD simulation can also replicate the reverse current-voltage curve, but also can also tell you why the device is experiencing breakdown. In TCAD the engineer can “see inside” the device and identify what region within the semiconductor first succumbs to breakdown due to high impact ionization generation

Design Technology Co-Optimization (DTCO)

  • TCAD is part of a DTCO flow which improves designs across multiple domains – Layout, Process, Device, SPICE, and RC extraction
  •  A full TCAD to SPICE flow, in an integrated DTCO environment, delivers clear actionable results for circuit design optimization

Virtual Experimentation

  • Experiment with cause and effect: Change the device design (layout), technology (semiconductor process steps) or device operation condition (biasing, etc) and understand and improve device performance
  • Experiment with theories in TCAD: control the impact of various physics in the device via model settings and coefficients. If theory as applied to simulation matches the measured result, you may have found the root cause and gained physical understanding of device performance

Communicate Device Complexities Clearly

  • Semiconductor device design, and processing of semiconductors is a complex task. Engineers must work collaboratively to solve problems, explain issues and opportunities to a variety of colleagues with varied technical expertise
  • Utilizing TCAD can clearly communicate device and process changes; communicating potential performance improvements with clarity while minimizing manufacturing cycle times

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SILVACO TCAD - https://silvaco.com/tcad/

More Examples at https://silvaco.com/examples/tcad/index.html

 

Grant of License.  SILVACO grants Licensee a non‑exclusive, non-transferable license to Use the Software only for Educational Purposes by Licensee's employees registered students, and registered users on nanoHUB and only on the Designated System(s).  For the avoidance of doubt, this license grants expressly prohibits Licensee from Using the Software for the purposes of (i) research & development except for that which is for Educational Purposes or (ii) engaging in benchmark or competitive analysis. Licensee may allow Use of the Software by Licensee’s users, provided that such users agree to terms substantially in accordance with those found herein. Licensee shall ensure that licenses granted hereunder are being Used in accordance with this Agreement, including by removing access to the Software from students who no longer have a need to access it for Educational Purposes.

Ownership.  All ownership rights, title and interest in and to the Software, documentation and other Confidential Information, and all copies thereof and changes thereto, are and shall remain exclusively in SILVACO.  All rights in the Software not expressly granted hereunder are reserved to SILVACO. Licensee has all ownership rights, title and interest in and to the output created by the Software.

Warranty

LICENSEE ACKNOWLEDGES AND AGREES THAT THE SOFTWARE IS PROVIDED "AS IS."   SILVACO SPECIFICALLY EXCLUDES AND DISCLAIMS ALL WARRANTIES, WHETHER EXPRESS, IMPLIED OR STATUTORY, INCLUDING, WITHOUT LIMITATION, THE IMPLIED WARRANTIES OF MERCHANTABILITY, NONINRINGEMENT AND OF FITNESS FOR A PARTICULAR PURPOSE. SILVACO WILL NOT BE LIABLE, AND SPECIFICALLY DISCLAIMS RESPONSIBILITY, FOR ANY SPECIAL, INDIRECT, INCIDENTAL OR CONSEQUENTIAL DAMAGES ARISING OUT OF THIS AGREEMENT OR THE USE OR OPERATION OF THE SOFTWARE.

 

Cite this work

Researchers should cite this work as follows:

  • eric guichard (2022), "Silvaco TCAD," https://nanohub.org/resources/silvacotcad. (DOI: 10.21981/1DAE-YC76).

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