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By Jason Clark1, Prabhakar Marepalli1

1. Purdue University

A tool for ready-made MEMS

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Version 0.05 - published on 23 Jul 2010

doi:10.4231/D3QR4NQ4Z cite this

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SugarCube is a tool which facilitates the parameterization of ready-made MEMS. Using this tool one can investigate the performance of parameterized MEMS which are available in the form of hierarchical libraries.

SugarCube is a front end of Sugar modeling and simulation engine. It has hierarchical library of commonly-used MEMS, many of which are previously published in literature. Once a user selects a system to explore, he can modify the parameters (geometric and material) and inspect the performance of the tool with these new conditions. Different kinds of analysis like static, transient or frequency are possible. The numerical results are plotted and the deflected MEMS is displayed. The data can be saved and downloaded.

Cite this work

Researchers should cite this work as follows:

  • Jason Clark; Prabhakar Marepalli (2010), "SugarCube," (DOI: 10.4231/D3QR4NQ4Z).

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Tags, a resource for nanoscience and nanotechnology, is supported by the National Science Foundation and other funding agencies. Any opinions, findings, and conclusions or recommendations expressed in this material are those of the author(s) and do not necessarily reflect the views of the National Science Foundation.