You must login before you can run this tool.
tsuprem4
TSUPREM-4 is a computer program for simulating the processing steps used in the manufacture of silicon integrated circuits and discrete devices.
Version 2016-03 - published on 31 Jan 2023
doi:10.21981/G7SH-5D85 cite this
This tool is closed source.
Citations Non-affiliated (0) | Affiliated (1)
Affiliated authors
- B. Reddy, (2012), "Nanoscale BioFETs For Ultrasensitive PH And Biomolecular Detection", : pg: 1-170