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tsuprem4
TSUPREM-4 is a computer program for simulating the processing steps used in the manufacture of silicon integrated circuits and discrete devices.
Version 2016-03 - published on 31 Jan 2023
doi:10.21981/G7SH-5D85 cite this
This tool is closed source.
Versions
Version | Released | DOI Handle | Published |
---|---|---|---|
2016-03 | 31 Jan 2023 | doi:10.21981/G7SH-5D85 | yes |
1.4 | 26 Aug 2014 | doi:10.4231/D3NC5SD32 | no |
1.3 | 27 Jul 2009 | doi:10.4231/D3MK6578X | no |
1.2 | 15 Jul 2008 | doi:10.4231/D32B8VB40 | no |
1.1 | 16 Jan 2008 | doi:10.4231/D3WS8HK6W | no |
1.0 | 20 Apr 2007 | doi:10.4231/D31J9771W | no |