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By Steven Clark

Purdue University

TSUPREM-4 is a computer program for simulating the processing steps used in the manufacture of silicon integrated circuits and discrete devices.

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Version 1.4 - published on 26 Aug 2014

doi:10.4231/D3NC5SD32 cite this

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Version Released DOI Handle Published
1.4 26 Aug 2014 doi:10.4231/D3NC5SD32 yes
1.3 27 Jul 2009 doi:10.4231/D3MK6578X no
1.2 15 Jul 2008 doi:10.4231/D32B8VB40 no
1.1 16 Jan 2008 doi:10.4231/D3WS8HK6W no
1.0 20 Apr 2007 doi:10.4231/D31J9771W no, a resource for nanoscience and nanotechnology, is supported by the National Science Foundation and other funding agencies. Any opinions, findings, and conclusions or recommendations expressed in this material are those of the author(s) and do not necessarily reflect the views of the National Science Foundation.