All Categories (1-2 of 2)

1. Learning Module: MEMS Micromachining Overview

   22 Jun 2017 | | Contributor(s):: Southwest Center for Microsystems Education (SCME)

   This learning module provides an overview of three micromachining processes (bulk, surface, LIGA) used for the fabrication of microsystems or MEMS (MicroElectroMechanical Systems).  Activities are provided that contribution to a better understanding of these processes and that encourage...

2. Learning Module: MEMS Micromachining Overview - Instructor Guides

   22 Jun 2017 | | Contributor(s):: Southwest Center for Microsystems Education (SCME)

   This learning module provides an overview of three micromachining processes (bulk, surface, LIGA) used for the fabrication of microsystems or MEMS (MicroElectroMechanical Systems).  Activities are provided that contribution to a better understanding of these processes and that encourage...