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Silvaco Athena - Part 2
04 Aug 2011 | Teaching Materials | Contributor(s): Dragica Vasileska
This set of powerpoint slides describes the diffusion and the oxidation process. Also briefly described are etching and epitaxy process.
Illinois ECE598XL Semiconductor Nanotechnology - 2 - Nanostructure Epitaxial Growth Techniques
27 Jun 2011 | Online Presentations | Contributor(s): Xiuling Li