Tags: Epitaxial Growth

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  1. Silvaco Athena - Part 2

    04 Aug 2011 | Contributor(s):: Dragica Vasileska

    This set of powerpoint slides describes the diffusion and the oxidation process. Also briefly described are etching and epitaxy process.

  2. Illinois ECE598XL Semiconductor Nanotechnology - 2 - Nanostructure Epitaxial Growth Techniques

    27 Jun 2011 | | Contributor(s):: Xiuling Li