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Learning Module: Etch Processes Overview for Microsystems - Instructor Guides
25 Apr 2017 | Teaching Materials | Contributor(s): Southwest Center for Microsystems Education (SCME)
This learning module introduces the most common etch processes used for the fabrication of microsystems. Activities allow students to demonstrate their understanding of the terminology and...
Wet Etching in Nanofabrication
11 Jan 2017 | Teaching Materials | Contributor(s): Manuel Casillas
This lab will help students understand how chemical reactions are used to create the specific shapes on surfaces of crystalline materials, which make up functional components within electronics....
ECE 695Q Lecture 44: Etching
02 Dec 2016 | Online Presentations | Contributor(s): Minghao Qi
ECE 695Q Lecture 46: Dry Etching II
01 Dec 2016 | Online Presentations | Contributor(s): Minghao Qi
ECE 695Q Lecture 47: Dry Etching III
Sean M Rinehart
Silvaco Athena - Part 2
04 Aug 2011 | Teaching Materials | Contributor(s): Dragica Vasileska
This set of powerpoint slides describes the diffusion and the oxidation process. Also briefly described are etching and epitaxy process.