Resources (1-3 of 3)

1. Learning Module: Photolithography Overview for MEMS

   26 Apr 2017 | | Contributor(s):: Southwest Center for Microsystems Education (SCME)

   This learning module provides an overview of the most common photolithography process used for the fabrication of microelectromechanical systems (MEMS), its terminology and basic concepts.  Activities allow you to further explore some of these concepts.

2. Learning Module: Photolithography Overview for MEMS - Instructor Guides

   26 Apr 2017 | | Contributor(s):: Southwest Center for Microsystems Education (SCME)

   This learning modules provides an overview of the most common photolithography process used in the fabrication of microelectromechnical systems (MEMS), its terminology and basic concepts.  Activities allows students to further explore some of these concepts.

3. Nanotechnology Reflection Survey

   07 Apr 2014 | | Contributor(s):: Heidi A Diefes-Dux