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  1. Tsuprem4 simulation

    Closed | Responses: 0

    I am using Tsuprem4 , i want to simulate germanium ion implant with different AMU

    How to write in the  tsuprem4 deck the changing of different type of AMU

    tahnks for...

  2. Kevin Grossklaus

    I am a graduate research assistant at the University of Michigan- Ann Arbor, working in the Millunchick group. My research exams ion irradiation effects on III-V semiconductor film growth, ion...

  3. Hadley Pattin

  4. Process Modeling

    23 Aug 2011 | Series | Contributor(s): Dragica Vasileska

    This series on process modeling describes key process modeling steps such as implantation, diffusion, oxidation, etching, deposition, etc.

  5. Silvaco Athena - Part 1

    04 Aug 2011 | Teaching Materials | Contributor(s): Dragica Vasileska

    This is part of a series of lectures on process modeling. In this lecture some introductory concepts are described followed by a description of the ion implantation process.

  6. ACUTE - Process Simulation Assignment

    28 Jul 2011 | Teaching Materials | Contributor(s): Dragica Vasileska, Gerhard Klimeck

    This assignment teaches the students the ion implantation process., a resource for nanoscience and nanotechnology, is supported by the National Science Foundation and other funding agencies. Any opinions, findings, and conclusions or recommendations expressed in this material are those of the author(s) and do not necessarily reflect the views of the National Science Foundation.