Tags: ion implantation

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  1. Tsuprem4 simulation

    Closed | Responses: 0

    I am using Tsuprem4 , i want to simulate germanium ion implant with different AMU

    How to write in the  tsuprem4 deck the changing of different type of AMU

    tahnks for...


  2. Kevin Grossklaus

    I am a graduate research assistant at the University of Michigan- Ann Arbor, working in the Millunchick group. My research exams ion irradiation effects on III-V semiconductor film growth, ion...


  3. Hadley Pattin


  4. Process Modeling

    23 Aug 2011 | Series | Contributor(s): Dragica Vasileska

    This series on process modeling describes key process modeling steps such as implantation, diffusion, oxidation, etching, deposition, etc.


  5. Silvaco Athena - Part 1

    04 Aug 2011 | Teaching Materials | Contributor(s): Dragica Vasileska

    This is part of a series of lectures on process modeling. In this lecture some introductory concepts are described followed by a description of the ion implantation process.


  6. ACUTE - Process Simulation Assignment

    28 Jul 2011 | Teaching Materials | Contributor(s): Dragica Vasileska, Gerhard Klimeck

    This assignment teaches the students the ion implantation process.