DATE CHANGE: nanoHUB could be intermittently unavailable on 05/06 from 8:00 am – 1:00 pm (EST) for scheduled maintenance. All tool sessions will expire on 05/06 at 8:00 am (EST).
Find information on common issues.
Ask questions and find answers from other users.
Suggest a new site feature or improvement.
Check on status of your tickets.
Closed | Responses: 0
I am using Tsuprem4 , i want to simulate germanium ion implant with different AMU
How to write in the tsuprem4 deck the changing of different type of AMU
23 Aug 2011 | Series | Contributor(s): Dragica Vasileska
This series on process modeling describes key process modeling steps such as implantation, diffusion, oxidation, etching, deposition, etc.
Silvaco Athena - Part 1
04 Aug 2011 | Teaching Materials | Contributor(s): Dragica Vasileska
This is part of a series of lectures on process modeling. In this lecture some introductory concepts are described followed by a description of the ion implantation process.
ACUTE - Process Simulation Assignment
28 Jul 2011 | Teaching Materials | Contributor(s): Dragica Vasileska, Gerhard Klimeck
This assignment teaches the students the ion implantation process.