Tags: lithography

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  1. ECE 695Q: Nanometer Scale Patterning and Processing

    11 Jul 2016 | Courses | Contributor(s): Minghao Qi

    This course is a top-down approach to the fabrication of nanometer-scale (<100nm) structures. Principles of lithography, film deposition, reactive-ion etch and planarization are presented. The...

    https://nanohub.org/resources/24028

  2. ECE 695Q Lecture 10: Optical Lithography – Resolution Enhancement Techniques

    17 Jun 2016 | Online Presentations | Contributor(s): Minghao Qi

    https://nanohub.org/resources/24289

  3. ECE 695Q Lecture 15: Extreme UV (EUV) Lithography – Optics, Mask, Resist, and Contaminaton Control

    17 Jun 2016 | Online Presentations | Contributor(s): Minghao Qi

    https://nanohub.org/resources/24438

  4. ECE 695Q Lecture 17: Electron Optics and Lithography II

    16 Jun 2016 | Online Presentations | Contributor(s): Minghao Qi

    https://nanohub.org/resources/24440

  5. ECE 695Q Lecture 14: Extreme UV (EUV) Lithography – EUV Source (Hot and Dense Plasma)

    16 Jun 2016 | Online Presentations | Contributor(s): Minghao Qi

    https://nanohub.org/resources/24437

  6. ECE 695Q Lecture 22: Shaped-Electron-Beam Lithography

    16 Jun 2016 | Online Presentations | Contributor(s): Minghao Qi

    https://nanohub.org/resources/24445

  7. ECE 695Q Lecture 18: Electron Beam Lithography I

    14 Jun 2016 | Online Presentations | Contributor(s): Minghao Qi

    https://nanohub.org/resources/24441

  8. ECE 695Q Lecture 13: Extreme UV (EUV) Lithography – Overview, Why EUV Lithography?

    14 Jun 2016 | Online Presentations | Contributor(s): Minghao Qi

    https://nanohub.org/resources/24311

  9. ECE 695Q Lecture 12: Optical Lithography – Contrast and Resolution in Microscopy and Lithography Systems

    06 Jun 2016 | Online Presentations | Contributor(s): NanoBio Node, Minghao Qi

    https://nanohub.org/resources/24310

  10. ECE 695Q Lecture 08: Optical Lithography – Alignment

    06 Jun 2016 | Online Presentations | Contributor(s): Minghao Qi

    https://nanohub.org/resources/24287

  11. ECE 695Q Lecture 09: Optical Lithography - Position Detection

    03 Jun 2016 | Online Presentations | Contributor(s): Minghao Qi

    https://nanohub.org/resources/24288

  12. ECE 695Q Lecture 11: Optical Lithography – Resolution Enhancement Techniques II

    03 Jun 2016 | Online Presentations | Contributor(s): Minghao Qi

    https://nanohub.org/resources/24290

  13. ECE 695Q Lecture 03: Lithography Used In Semiconductor Manufacturing

    01 Jun 2016 | Online Presentations | Contributor(s): Minghao Qi

    https://nanohub.org/resources/24282

  14. ECE 695Q Lecture 02: Overview of Lithography

    12 May 2016 | Online Presentations | Contributor(s): Minghao Qi

    https://nanohub.org/resources/24030

  15. tarini murugesan

    https://nanohub.org/members/84965

  16. Chemically Enhanced Carbon-Based Nanomaterials and Devices

    09 Nov 2010 | Online Presentations | Contributor(s): Mark Hersam

    Carbon-based nanomaterials have attracted significant attention due to their potential to enable and/or improve applications such as transistors, transparent conductors, solar cells, batteries,...

    https://nanohub.org/resources/9929

  17. Illinois ME 498 Introduction of Nano Science and Technology, Lecture 28: Nanomanufacturing 3: Imprint Technology

    28 Jan 2010 | Online Presentations | Contributor(s): Nick Fang

    Nanomanufacturing 3: Imprint Technology Topics: Imprinting: A Long History Nanoimprinting and Hot Embossing Example of nanoimprint machine Volume Manufacture Large-Scale NIL...

    https://nanohub.org/resources/8240

  18. ME 597 Lecture 26: Scanning Probe Nanolithography

    02 Dec 2009 | Online Presentations | Contributor(s): Ron Reifenberger

    Topics: STM – early work Arranging atoms with a tip Local Oxidation Lithography (Electrochemical) Dip Pen Lithography Nanografting Related reading: Garcia, Martinez and Martinez,...

    https://nanohub.org/resources/7933

  19. Jun 11 2009

    Lab-on-a-Chip Workshop

    This one-day workshop is designed to introduce researchers to the different technologies used in lab-on-chip systems. Speakers will include U-M faculty and staff members. The workshop is aimed at...

    https://nanohub.org/events/details/247

  20. Kyle H Montgomery

    Kyle Montgomery is a research engineer working at the Air Force Research Laboratory. Previously, he was a research scientist and lecturer in the Electrical & Computer Engineering Department at...

    https://nanohub.org/members/23468