Jul 23 2019
Micro Nano Technology Education Special Interest Group - Face-to-Face Meeting at High Impact Technology Conference
Sep 27 2017
Lab2Fab 2017: Integration for Innovation
18 Feb 2016 | | Contributor(s):: Jason Clark, Quincy Clark
CAD for MEMS via systems of compact models. This commercial tool is published by Sugarcube Systems, which requires a registration fee to use. The nanoHUB does not receive revenue or assume liability for the use of this tool.
Learning Module: Chemical Lab Safety Rules
24 Apr 2016 | | Contributor(s):: SCME NM
The fabrication of micro and nano devices requires the use of several types of chemicals, both inert and hazardous. This learning module provides the general safety rules for working in facilities and laboratories that use chemicals. Through its activities, the learning module gives...
Learning Module: Deposition Processes Overview for Microsystems
24 Apr 2016 | | Contributor(s):: SCME NM, MJ Willis
This learning module is an overview of the common deposition processes used for the fabrication of micro-size devices. This learning module discusses thermal oxidation, chemical deposition and physical deposition processes. Activities are provided for further exploration into these...
MEMOSA-based 2-Dimensional Pull-In Voltage Simulation
19 May 2015 | | Contributor(s):: Peter Kolis
Determine the pull-in voltage of a membrane under electrostatic actuation using the MEMOSA FVM module
Creep deformation in RF-MEMS
15 Jan 2015 | | Contributor(s):: Marisol Koslowski, Alejandro Strachan, Gabriela Venturini, Diego Fernando Cifuentes Pardo, Guillermo Andres Roman
Simulates creep deformation in fixed - fixed beam MEMS model