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Nano Electro-Mechanical Systems (NEMS) are tiny
machines built at the nanometer scale. Current
NEMS applications are simple machines, such as
the tiny cantilever shown at the right. An electrical circuit measures the deflection
of the lever. A larger version of this device,
with dimensions at the micrometer or millimeter
scale, is commonly used as an airbag sensor in
automobiles. A sudden stop causes a strong
deflection of the lever, which signals that
the airbags should be deployed. At the nano
scale, such a lever is sensitive enough to
measure the weight of individual atoms or
molecules resting upon it.
Learn more about NEMS from the
resources available on this site, listed below.
Learning Module: Microcantilevers - Instructor Materials
09 Feb 2017 | Teaching Materials | Contributor(s): Southwest Center for Microsystems Education (SCME)
This learning module is an overview of microcantilevers, how they work and how they are used in micro and nanotechnology. These are the instructor materials.
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12 May 2016 | Tools | Contributor(s): Jason Clark, Quincy Clark
CAD for MEMS via systems of compact models. This commercial tool is published by Sugarcube Systems, which requires a registration fee to use. The nanoHUB does not receive revenue or assume...
Uniaxial and Biaxial Stress Strain Calculator for Semiconductors
17 Jan 2014 | Tools | Contributor(s): Jamie Teherani
Simulate stress or strain along user-defined Miller directions for arbitrary stress/strain configurations.
In Search of a Better MEMS-Switch: An Elementary theory of how nanostructured dielectrics may soften landing, increase travel range, and decrease energy dissipation
06 Jun 2012 | Online Presentations | Contributor(s): Muhammad Alam
In this talk, I will discuss an elementary theory of the role of nanostructured electrodes in addressing some of the challenges from a fundamentally different perspective. The goal is to start a...
Illinois BioNanotechnology Seminar Series Fall 2011: Deconvolving Stiffness in MEMS Pedestal Cell Mass Measurements
05 Dec 2011 | Online Presentations | Contributor(s): Elise Corbin
The complex relationships between a cell's behavior and the physical properties of both itself and its environment have long been of interest. Specifically, the understanding the mechanisms...
Illinois CNST Annual Nanotechnology Workshop 2010 Lecture 12: Multiscale Analysis of Silicon NEMS
02 May 2011 | Online Presentations | Contributor(s): Narayan Aluru
2009 GEM4 Summer School - University of Illinois at Urbana-Champaign Lecture 5: Mechanics insights into the pathophysiology of human disease; Microfluidics approaches to studying human diseases
20 Jul 2010 | Online Presentations | Contributor(s): Chwee Teck Lim
Carbon Nanotube Relay
16 Feb 2010 | Tools | Contributor(s): Sansiri Tanachutiwat, wei wang
CNT NEMS as mechanical relay for memory applications
Peanuts vs. Pyramids: Two Perspectives on MEMS
29 Dec 2009 | Online Presentations | Contributor(s): Stephen D. Senturia
MEMS, the acronym for Micro-electromechanical Systems, also known simply as “Micro-systems,” come in two main types: commodity products (the peanuts) and MEMS-enabled products (the pyramids,...
Molecular Sensors for MEMS
10 Dec 2009 | Online Presentations | Contributor(s): John P. Sullivan
This seminar will cover the issues involved in using molecular sensors in MEMS and their application to microchannels, supersonic micronozzles, microjet impingement, microturbines and unsteady...
VEDA: Amplitude Modulated Scanning
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20 Oct 2009 | Tools | Contributor(s): John Melcher, Shuiqing Hu, Arvind Raman, Steven Douglas Johnson, Daniel Kiracofe
This tool is being replaced by VEDA 2.0. Use that tool instead.
Nanotribology, Nanomechanics and Materials Characterization Studies
08 Jun 2009 | Online Presentations | Contributor(s): Bharat Bhushan
Fundamental nanotribological studies provide insight to molecular origins of interfacial phenomena including adhesion, friction, wear and lubrication.
Friction and wear of lightly loaded...
The Challenges of Micro-System Product Development
05 Jun 2009 | Online Presentations | Contributor(s): James J. Allen
This talk will discuss the historical development of micro‐system technology, the products that have been developed and the challenges to development of a reliable product.
Experiences with nonintrusive polynomial Chaos and stochastic collocation methods for uncertainty analysis and design
13 Mar 2009 | Online Presentations | Contributor(s): Michael S. Eldred
Non—intrusive polynomial chaos expansion (PCE) and stochastic collocation (SC) methods are attractive
techniques for uncertainty quantification due to their abilities to produce functional...
SUGARCube - Netlist Input Tool
29 Jan 2009 | Tools | Contributor(s): Fengyuan Li, Jason Clark
Simulate the user input netlist by SUGAR2.0
MEMS Resonator - Tang
Parametric Tang's Comb-Drive Modeling and Simulation
PRISM Seminar Series
05 Nov 2008 | Series | Contributor(s): Jayathi Murthy, Alejandro Strachan
Welcome to the PRISM Seminar Series.
PRIMS: NNSA Center for Prediction of Reliability, Integrity and Survivability of Microsystems, is a university center funded by the Department of Energy's...
Gas Damping of Microcantilevers at Low Ambient Pressures
03 Nov 2008 | Online Presentations | Contributor(s): Rahul Anil Bidkar
This seminar will present a theoretical model for predicting the gas damping of long, rectangular silicon
microcantilevers, which are oscillating in an unbounded gaseous medium with the ambient...
SUGARCube - Cantilever
03 Oct 2008 | Tools | Contributor(s): Fengyuan Li, Brandon Patterson, Jason Clark, yi zeng
Cantilever modeling and simulation with different loads
Micro-fabricated Biosensors for Cardiac Diagnostics
30 Jul 2008 | Online Presentations | Contributor(s): V.Ramgopal Rao
In this talk the current status of an ongoing effort in the Electrical Engineering Department at IIT Bombay on the development of an integrated systems to provide point-of-care diagnostic support...