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Learning Module: Deposition Processes Overview for Microsystems
26 Apr 2017 | Teaching Materials | Contributor(s): Southwest Center for Microsystems Education (SCME)
This learning module is an overview of the common deposition processes used for the fabrication of micro-size devices. This learning module discusses thermal oxidation, chemical deposition...
Learning Module: Deposition Processes Overview for Microsystems - Instructor Guides
This learning module is an introduction to the common processes used to deposit thin films for the fabrication of micro-size devices. Thermal oxidation and several types of deposition are...
Enhancing your Micro and Nano Technology Courses with Free nanoHUB Resources and Simulations
12 May 2015 | Presentation Materials | Contributor(s): Tanya Faltens
This presentation given at a workshop in the 2014 MNT (Micro Nano Technology) Conference in Albuquerque, New Mexico, provides an overview of nanoHUB resources that will be useful for MNT...
Exploration of the Oxidation Rate of Silicon Wafers via Simulation
04 Nov 2014 | Teaching Materials | Contributor(s): Tanya Faltens
This teaching resource is designed for instructors who would like to introduce exploration through simulation into their lessons on silicon oxidation. Step-by-step instructions are provided...
Oxidation Behavior of CoCr Thin Films
07 Oct 2011 | Papers | Contributor(s): Brian Demczyk
In this work, elemental redistribution of annealed CoCr thin films has been investigated by X-ray photoelectron spectroscopy.
23 Aug 2011 | Series | Contributor(s): Dragica Vasileska
This series on process modeling describes key process modeling steps such as implantation, diffusion, oxidation, etching, deposition, etc.
Silvaco Athena - Part 2
04 Aug 2011 | Teaching Materials | Contributor(s): Dragica Vasileska
This set of powerpoint slides describes the diffusion and the oxidation process. Also briefly described are etching and epitaxy process.
How can I see oxidation thickness vs temperature (y – x) graph?
Closed | Responses: 0
I use this tool first today.
So I don’t have enough skill to rearrange x-axis.
Can you guys help me to see
oxi thick vs temperature graph ?
I hope you...