Tags: processing

Resources (21-40 of 95)

  1. ECE 695Q Lecture 21: E-Beam Lithography Process

    20 Sep 2016 | Online Presentations | Contributor(s): Minghao Qi

    https://nanohub.org/resources/24444

  2. ECE 695Q: Nanometer Scale Patterning and Processing

    11 Jul 2016 | Courses | Contributor(s): Minghao Qi

    This course is a top-down approach to the fabrication of nanometer-scale (<100nm) structures. Principles of lithography, film deposition, reactive-ion etch and planarization are presented. The...

    https://nanohub.org/resources/24028

  3. ECE 695Q Lecture 16: Electron Optics and Lithography I

    29 Jun 2016 | Online Presentations | Contributor(s): Minghao Qi

    https://nanohub.org/resources/24439

  4. ECE 695Q Lecture 10: Optical Lithography – Resolution Enhancement Techniques

    17 Jun 2016 | Online Presentations | Contributor(s): Minghao Qi

    https://nanohub.org/resources/24289

  5. ECE 695Q Lecture 15: Extreme UV (EUV) Lithography – Optics, Mask, Resist, and Contaminaton Control

    17 Jun 2016 | Online Presentations | Contributor(s): Minghao Qi

    https://nanohub.org/resources/24438

  6. ECE 695Q Lecture 17: Electron Optics and Lithography II

    16 Jun 2016 | Online Presentations | Contributor(s): Minghao Qi

    https://nanohub.org/resources/24440

  7. ECE 695Q Lecture 14: Extreme UV (EUV) Lithography – EUV Source (Hot and Dense Plasma)

    16 Jun 2016 | Online Presentations | Contributor(s): Minghao Qi

    https://nanohub.org/resources/24437

  8. ECE 695Q Lecture 18: Electron Beam Lithography I

    14 Jun 2016 | Online Presentations | Contributor(s): Minghao Qi

    https://nanohub.org/resources/24441

  9. ECE 695Q Lecture 13: Extreme UV (EUV) Lithography – Overview, Why EUV Lithography?

    14 Jun 2016 | Online Presentations | Contributor(s): Minghao Qi

    https://nanohub.org/resources/24311

  10. ECE 695Q Lecture 12: Optical Lithography – Contrast and Resolution in Microscopy and Lithography Systems

    06 Jun 2016 | Online Presentations | Contributor(s): Minghao Qi

    https://nanohub.org/resources/24310

  11. ECE 695Q Lecture 08: Optical Lithography – Alignment

    06 Jun 2016 | Online Presentations | Contributor(s): Minghao Qi

    https://nanohub.org/resources/24287

  12. ECE 695Q Lecture 05: Resist Technology

    06 Jun 2016 | Online Presentations | Contributor(s): Minghao Qi

    https://nanohub.org/resources/24284

  13. ECE 695Q Lecture 06: Optical Lithography - Optical Imaging System

    03 Jun 2016 | Online Presentations | Contributor(s): Minghao Qi

    https://nanohub.org/resources/24285

  14. ECE 695Q Lecture 09: Optical Lithography - Position Detection

    03 Jun 2016 | Online Presentations | Contributor(s): Minghao Qi

    https://nanohub.org/resources/24288

  15. ECE 695Q Lecture 11: Optical Lithography – Resolution Enhancement Techniques II

    03 Jun 2016 | Online Presentations | Contributor(s): Minghao Qi

    https://nanohub.org/resources/24290

  16. ECE 695Q Lecture 03: Lithography Used In Semiconductor Manufacturing

    01 Jun 2016 | Online Presentations | Contributor(s): Minghao Qi

    https://nanohub.org/resources/24282

  17. ECE 695Q Lecture 04: Contamination Control and Substrate Cleaning

    01 Jun 2016 | Online Presentations | Contributor(s): Minghao Qi

    https://nanohub.org/resources/24283

  18. ECE 695Q Lecture 07: Optical Lithography – Lithography System

    01 Jun 2016 | Online Presentations | Contributor(s): Minghao Qi

    https://nanohub.org/resources/24286

  19. ECE 695Q Lecture 01: Introduction

    12 May 2016 | Online Presentations | Contributor(s): Minghao Qi

    https://nanohub.org/resources/24029

  20. ECE 695Q Lecture 02: Overview of Lithography

    12 May 2016 | Online Presentations | Contributor(s): Minghao Qi

    https://nanohub.org/resources/24030