Tags: processing

Resources (21-40 of 94)

  1. ECE 695Q: Nanometer Scale Patterning and Processing

    11 Jul 2016 | Courses | Contributor(s): Minghao Qi

    This course is a top-down approach to the fabrication of nanometer-scale (<100nm) structures. Principles of lithography, film deposition, reactive-ion etch and planarization are presented. The...

    https://nanohub.org/resources/24028

  2. ECE 695Q Lecture 16: Electron Optics and Lithography I

    29 Jun 2016 | Online Presentations | Contributor(s): Minghao Qi

    https://nanohub.org/resources/24439

  3. ECE 695Q Lecture 10: Optical Lithography – Resolution Enhancement Techniques

    17 Jun 2016 | Online Presentations | Contributor(s): Minghao Qi

    https://nanohub.org/resources/24289

  4. ECE 695Q Lecture 15: Extreme UV (EUV) Lithography – Optics, Mask, Resist, and Contaminaton Control

    17 Jun 2016 | Online Presentations | Contributor(s): Minghao Qi

    https://nanohub.org/resources/24438

  5. ECE 695Q Lecture 17: Electron Optics and Lithography II

    16 Jun 2016 | Online Presentations | Contributor(s): Minghao Qi

    https://nanohub.org/resources/24440

  6. ECE 695Q Lecture 14: Extreme UV (EUV) Lithography – EUV Source (Hot and Dense Plasma)

    16 Jun 2016 | Online Presentations | Contributor(s): Minghao Qi

    https://nanohub.org/resources/24437

  7. ECE 695Q Lecture 18: Electron Beam Lithography I

    14 Jun 2016 | Online Presentations | Contributor(s): Minghao Qi

    https://nanohub.org/resources/24441

  8. ECE 695Q Lecture 13: Extreme UV (EUV) Lithography – Overview, Why EUV Lithography?

    14 Jun 2016 | Online Presentations | Contributor(s): Minghao Qi

    https://nanohub.org/resources/24311

  9. ECE 695Q Lecture 12: Optical Lithography – Contrast and Resolution in Microscopy and Lithography Systems

    06 Jun 2016 | Online Presentations | Contributor(s): Minghao Qi

    https://nanohub.org/resources/24310

  10. ECE 695Q Lecture 08: Optical Lithography – Alignment

    06 Jun 2016 | Online Presentations | Contributor(s): Minghao Qi

    https://nanohub.org/resources/24287

  11. ECE 695Q Lecture 05: Resist Technology

    06 Jun 2016 | Online Presentations | Contributor(s): Minghao Qi

    https://nanohub.org/resources/24284

  12. ECE 695Q Lecture 06: Optical Lithography - Optical Imaging System

    03 Jun 2016 | Online Presentations | Contributor(s): Minghao Qi

    https://nanohub.org/resources/24285

  13. ECE 695Q Lecture 09: Optical Lithography - Position Detection

    03 Jun 2016 | Online Presentations | Contributor(s): Minghao Qi

    https://nanohub.org/resources/24288

  14. ECE 695Q Lecture 11: Optical Lithography – Resolution Enhancement Techniques II

    03 Jun 2016 | Online Presentations | Contributor(s): Minghao Qi

    https://nanohub.org/resources/24290

  15. ECE 695Q Lecture 03: Lithography Used In Semiconductor Manufacturing

    01 Jun 2016 | Online Presentations | Contributor(s): Minghao Qi

    https://nanohub.org/resources/24282

  16. ECE 695Q Lecture 04: Contamination Control and Substrate Cleaning

    01 Jun 2016 | Online Presentations | Contributor(s): Minghao Qi

    https://nanohub.org/resources/24283

  17. ECE 695Q Lecture 07: Optical Lithography – Lithography System

    01 Jun 2016 | Online Presentations | Contributor(s): Minghao Qi

    https://nanohub.org/resources/24286

  18. ECE 695Q Lecture 01: Introduction

    12 May 2016 | Online Presentations | Contributor(s): Minghao Qi

    https://nanohub.org/resources/24029

  19. ECE 695Q Lecture 02: Overview of Lithography

    12 May 2016 | Online Presentations | Contributor(s): Minghao Qi

    https://nanohub.org/resources/24030

  20. Small Scale Stenciling: Mask Lab

    05 Apr 2016 | Teaching Materials | Contributor(s): Marilyn Garza

    This lab is analogous with some nanofabrication processes. This lab will help students understand some of the challenges encountered while making semiconductor chips and waveguides, both of which...

    https://nanohub.org/resources/23932