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ME 290R Lecture 3.2: Nanoimprint Lithography - Process Mechanics II
02 Apr 2019 | | Contributor(s):: Taylor, Hayden
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ME 290R Lecture 3.3: Nanoimprint Lithography - Process Mechanics III
02 Apr 2019 | | Contributor(s):: Taylor, Hayden
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ME 290R Lecture 3.4: Nanoimprint Lithography - Process Mechanics IV
02 Apr 2019 | | Contributor(s):: Taylor, Hayden
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ME 290R Lecture 1: Introduction
27 Mar 2019 | | Contributor(s):: Taylor, Hayden
An overview of current and emerging lithography technologies and challenges. Future lithography requirements (with reference to the International Technology Roadmap for Semiconductors). Requirements for integration of lithography with other process steps.
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ME 290R Lecture 2.1: Lithography Performance Criteria - Technical
27 Mar 2019 | | Contributor(s):: Taylor, Hayden
Ways to evaluate a lithography process. Topics include: resolution; line edge roughness; overlay capability; throughput; cost of ownership; capital cost; energy consumption and environmental impact (e.g. solvent usage; material wastage); pattern dependencies.
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ME 290R Lecture 2.2: Lithography Performance Criteria - Technical (Yield Modeling)
27 Mar 2019 | | Contributor(s):: Taylor, Hayden
Ways to evaluate a lithography process. Topics include: resolution; line edge roughness; overlay capability; throughput; cost of ownership; capital cost; energy consumption and environmental impact (e.g. solvent usage; material wastage); pattern dependencies.
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Tutorial on Two Photon Lithography Tool
26 Nov 2018 | | Contributor(s):: Mohammad Mahfuzul Kabir, Varun Ajit Kelkar
Two-photon lithography (TPL) is a nano-scale 3-d fabrication technique. TPL depends upon the two-photon polymerization process, whereby two incident photons of light are absorbed by a precursor material leading to polymerization. The smallest feature size (voxel) achievable in a TPL...
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Focused Ion Beam (FIB): “Seeing” and “Processing” at the Nano-Scale
01 Oct 2018 | | Contributor(s):: Wook Jun Nam, NACK Network
OutlineFIB OverviewFIB OperationFIB Applications
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Two Photon Lithography
06 Jul 2018 | | Contributor(s):: Mohammad Mahfuzul Kabir, Varun Ajit Kelkar, Darren K Adams, Kimani C Toussaint
Calculate voxel dimensions for a two-photon lithography process
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Learning Module: MEMS Micromachining Overview
22 Jun 2017 | | Contributor(s):: Southwest Center for Microsystems Education (SCME)
This learning module provides an overview of three micromachining processes (bulk, surface, LIGA) used for the fabrication of microsystems or MEMS (MicroElectroMechanical Systems). Activities are provided that contribution to a better understanding of these processes and that encourage...
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Learning Module: MEMS Micromachining Overview - Instructor Guides
22 Jun 2017 | | Contributor(s):: Southwest Center for Microsystems Education (SCME)
This learning module provides an overview of three micromachining processes (bulk, surface, LIGA) used for the fabrication of microsystems or MEMS (MicroElectroMechanical Systems). Activities are provided that contribution to a better understanding of these processes and that encourage...
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Learning Module: Photolithography Overview for MEMS
26 Apr 2017 | | Contributor(s):: Southwest Center for Microsystems Education (SCME)
This learning module provides an overview of the most common photolithography process used for the fabrication of microelectromechanical systems (MEMS), its terminology and basic concepts. Activities allow you to further explore some of these concepts.
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ECE 695Q Lecture 42: Advanced Lithography II
02 Dec 2016 | | Contributor(s):: Minghao Qi
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ECE 695Q Lecture 45: Dry Etching I
02 Dec 2016 | | Contributor(s):: Minghao Qi
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ECE 695Q Lecture 44: Etching
02 Dec 2016 | | Contributor(s):: Minghao Qi
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ECE 695Q Lecture 46: Dry Etching II
01 Dec 2016 | | Contributor(s):: Minghao Qi
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ECE 695Q Lecture 47: Dry Etching III
01 Dec 2016 | | Contributor(s):: Minghao Qi
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ECE 695Q Lecture 48: Planarization I
01 Dec 2016 | | Contributor(s):: Minghao Qi
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ECE 695Q Lecture 49: Planarization II
01 Dec 2016 | | Contributor(s):: Minghao Qi
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ECE 695Q Lecture 43: Advanced Lithography III
01 Nov 2016 | | Contributor(s):: Minghao Qi