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Fotolitografía Opción A (a base de solvente) - Photolithography (Option A))
29 Jun 2020 | | Contributor(s):: Nano-Link Center for Nanotechnology Education, James J Marti, Maryam Jalali, Rodfal Alberto Rodriguez (editor), María Teresa Rivera (editor)
Este módulo presenta una introducción y demostración de fotolitografía, proceso de copiar un patrón de alta resolución en múltiples sustratos. Los estudiantes replican los pasos clave en el proceso de fotolitografía y aprenden...
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Fotolitografía Opción B (a base de agua) - Photolithography (Option B))
29 Jun 2020 | | Contributor(s):: Nano-Link Center for Nanotechnology Education, James J Marti, Maryam Jalali, Rodfal Alberto Rodriguez (editor), María Teresa Rivera (editor)
Este módulo presenta una introducción y demostración de fotolitografía, proceso de copiar un patrón de alta resolución en múltiples sustratos. Los estudiantes replican los pasos clave en el proceso de fotolitografía y aprenden...
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Photolithography (Option A)
06 Feb 2020 | | Contributor(s):: James J Marti, Nano-Link Center for Nanotechnology Education
This module presents an introduction and demonstration of photolithography, the process of copying a high-resolution pattern onto multiple substrates. Students replicate key steps in the process of photolithography and learn how these processes fit into the fabrication of micro- and nanoscale...
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Photolithography (Option B)
06 Feb 2020 | | Contributor(s):: James J Marti, Nano-Link Center for Nanotechnology Education
This module presents an introduction and demonstration of a key step in photolithography, the process of patterning a substrate used in the manufacture of integrated circuit chips. Students replicate some of the steps in the process of photolithography, and learn how these processes fit into...
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Which tool I can go for simulating Lithographic process.
Q&A|Closed | Responses: 0
I want to give mask shape,minimum feature size and wavelength and see the results.Cn anyone suggest a tool?
https://nanohub.org/answers/question/1331