Tags: wafers

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  1. Learning Module: Crystallography Overview for MEMS - Instructor Guides

    27 Apr 2017 | Teaching Materials | Contributor(s): Southwest Center for Microsystems Education (SCME)

    This learning module introduces the science of crystallography and its importance to microtechnology and the fabrication of microelectromechanical systems (MEMS).  Four activities are...

    https://nanohub.org/resources/26427

  2. Craig Connolly

    https://nanohub.org/members/125804

  3. Illinois ME 498 Introduction of Nano Science and Technology, Lecture 26: Nanomanufacturing 1: Semiconductor Manufacturing

    20 Jan 2010 | Online Presentations | Contributor(s): Nick Fang, Omar Sobh

    Nanomaterials and Devices for Solar Energy Topics: From Si crystals to Wafers From Wafers to Chips Photolithography: Definitions Optical Lithography Multi-Photon Lithography E-Beam...

    https://nanohub.org/resources/8132