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  1. ECE 695Q: Nanometer Scale Patterning and Processing

    11 Jul 2016 | Courses | Contributor(s): Minghao Qi

    This course is a top-down approach to the fabrication of nanometer-scale (<100nm) structures. Principles of lithography, film deposition, reactive-ion etch and planarization are presented. The...

    https://nanohub.org/resources/24028