Teaching Materials (1-2 of 2)

1. Learning Module: Chemical Lab Safety Rules

   28 Apr 2016 | | Contributor(s):: SCME NM

   The fabrication of micro and nano devices requires the use of several types of chemicals, both inert and hazardous.  This learning module provides the general safety rules for working in facilities and laboratories that use chemicals.  Through its activities, the learning module gives...

2. Learning Module: Deposition Processes Overview for Microsystems

   28 Apr 2016 | | Contributor(s):: Support Center for Microsystems Education (SCME), MJ Willis

   This learning module is an overview of the common deposition processes used for the fabrication of micro-size devices.  This learning module discusses thermal oxidation, chemical deposition and physical deposition processes.  Activities are provided for further exploration into these...