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ECE 695Q Lecture 21: E-Beam Lithography Process
20 Sep 2016 | | Contributor(s):: Minghao Qi
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ECE 695Q Lecture 23: Nanofabrication with Focused Ion Beams – Overview & Ion Source and Optics
21 Jun 2016 | | Contributor(s):: Minghao Qi
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ECE 695Q Lecture 29: Focused Electron Beam Induced Deposition and Deposition Rate
10 Oct 2016 | | Contributor(s):: Minghao Qi
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ECE 695Q Lecture 32: Nanoimprint Lithography (NIL) – Overview and Thermal NIL Resists
21 Sep 2016 | | Contributor(s):: Minghao Qi
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ECE 695Q Lecture 33: Nanoimprint Lithography – Residual Layer After Nanoimprint
21 Sep 2016 | | Contributor(s):: Minghao Qi
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ECE 695Q Lecture 34: Nanoimprint Lithography – Pattern Dependence in Nanoimprint
21 Sep 2016 | | Contributor(s):: Minghao Qi
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ECE 695Q Lecture 35: Nanoimprint Lithography – UV Assisted Nanoimprint
21 Sep 2016 | | Contributor(s):: Minghao Qi
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ECE 695Q Lecture 36: Nanoimprint Lithography (NIL) – Alignment in NIL
28 Sep 2016 | | Contributor(s):: Minghao Qi
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ECE 695Q Lecture 37: Nanoimprint Lithography (NIL) - Resist for UV-NIL
12 Oct 2016 | | Contributor(s):: Minghao Qi
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ECE 695Q Lecture 38: Nanoimprint Lithography (NIL) – NIL Mold Fabrication
12 Oct 2016 | | Contributor(s):: Minghao Qi
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ECE 695Q Lecture 39: Nanoimprint Lithography (NIL) – NIL Tools
26 Sep 2016 | | Contributor(s):: Minghao Qi
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ECE 695Q Lecture 40: Nanoimprint Lithography (NIL) – Other NIL Approaches
26 Sep 2016 | | Contributor(s):: Minghao Qi
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ECE 695Q Lecture 41: Advanced Lithography I
12 Oct 2016 | | Contributor(s):: Minghao Qi
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ECE 695Q Lecture 42: Advanced Lithography II
02 Dec 2016 | | Contributor(s):: Minghao Qi
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ECE 695Q Lecture 43: Advanced Lithography III
01 Nov 2016 | | Contributor(s):: Minghao Qi
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ECE 695Q Lecture 44: Etching
02 Dec 2016 | | Contributor(s):: Minghao Qi
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ECE 695Q Lecture 45: Dry Etching I
02 Dec 2016 | | Contributor(s):: Minghao Qi
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ECE 695Q Lecture 46: Dry Etching II
01 Dec 2016 | | Contributor(s):: Minghao Qi
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ECE 695Q Lecture 47: Dry Etching III
01 Dec 2016 | | Contributor(s):: Minghao Qi
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ECE 695Q Lecture 48: Planarization I
01 Dec 2016 | | Contributor(s):: Minghao Qi