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Demis John

How can I output TIME to hit a given Thickness (do the calculation backwards)?

I'd like to use this in our 'fab: https://wiki.nanofab.ucsb.edu/wiki/Thermal_Processing_Recipes#Thermal_Oxidation_Recipes

I'd like to be able to tell users what coefficients to type in to model our furnace more accurately.

The plot generated is useful, but the points chosen don't always line up with the exact thickness I'm targeting.  I would like to be able to calculate the time to hit a given thickness, with custom coefficients if needed.

Thanks,

-- Demis

  1. tool:prolabox

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