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Home Members Stephen A. Campbell


  • Organization
    University of Minnesota

  • Employment Type
    University / College Faculty

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  • Address(es)
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  • Biography
    Stephen A. Campbell received a B.A. in physics from St. Thomas University and an M.S. and PhD in physics from Northwestern University in Evanston Illinois in 1977 and 1981, respectively. After a brief stint at Unisys where he worked on CMOS, he joined the University of Minnesota in Minneapolis Minnesota in 1986. He is on the faculty of the Department of Electrical and Computer Engineering and is directs the NanoFabricationCenter (, one of the NNIN nodes. He has about 200 refereed publications. His textbook, Fabrication Engineering at the Micro- and NanoscaleNew York: Oxford University Press, 1996, 2001, 2006, 2013 has been used in over 80 US schools as well as institutions in Europe and Asia. It has been translated into several languages. His work in the area of silicon process technology ultimately led to fundamental changes in the way that CMOS transistors are manufactured. More recently Professor Campbell has worked on carbon-based nanoelectromechanical devices (NEMS), silicon quantum dots, and thin film solar cells. Professor Campbell is a fellow of the IEEE, holds the Sanford P. and Lenore Edgerton BordeauChair in Electrical and Computer Engineering and is a Distinguished Professor in the University’s College of Science and Engineering.

  • Interests
    Enter your Interests., a resource for nanoscience and nanotechnology, is supported by the National Science Foundation and other funding agencies. Any opinions, findings, and conclusions or recommendations expressed in this material are those of the author(s) and do not necessarily reflect the views of the National Science Foundation.