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Introduction of MEMS Activity at Nano/Micro System Engineering Lab., Kyoto University
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15 Sep 2007 | Online Presentations | Contributor(s): OSAMU TABATA
We are aiming at the realization of microsystems and nanosystems with novel and unique functions by integrating functional elements in different domains such as mechanics, electronics, chemistry, optics and biotechnology. These micro/nano systems are expected to be novel machines, which will...