He is an associate editor of Journal of Micro Electro Mechanical Systems and an editorial board member of Sensors and Actuators. Also, he is a program committee member of many International Conferences. He was honored with the Science News Award for research in "Monolithic pressure-flow sensor" in 1987, Presentation Paper Award for research in "Anisotropic etching of silicon in TMAH solutions" in 1992, R&D 100 Award for research in "Thin film Young's modulus measurement apparatus" in 1993 and R&D 100 Award for research in "Thin film Tensile Tester" in 1998, Best Poster Award of 19th Sensor Symposium on Sensors, Micromachines, and Applied Systems for “Determination of Optimal Mask Movement Pattern for Moving Mask Deep X-Ray Lithography“ in 2002, Best Patent Award from Ritsumeikan University for “Material Processing and its apparatus using X-ray Lithography” in 2004. He is a member of the Japan Society of Mechanical Engineers, senior member of the Institute of Electrical Engineers of Japan and the Institute of Electrical and Electronics Engineers.
The Bindley Bioscience Center
Purdue Discovery Park
The NASA Institute for Nanoelectronics and Computing
The Network for Computational Nanotechnology
NCN Student Leadership Council
Department of Chemistry
Department of Physics
School of Chemical Engineering
School of Electrical and Computer Engineering
School of Mechanical Engineering
Researchers should cite this work as follows:
(2007), "Introduction of MEMS Activity at Nano/Micro System Engineering Lab., Kyoto University," http://nanohub.org/resources/3243.
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