What are MEMS and Why Do We Care?

By Matthias Pleil1; The Micro Nano Technology - Education Center2

1. Mechanical Engineering, University of New Mexico, Albuquerque, NM 2. Pasadena City College, Pasadena ,CA

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Abstract

Microelectromechanical Systems (MEMS) are ubiquitous in our daily lives and in every electronic systems that you interact with.  This presentation will cover several devices and systems as well as an overview of current trends of the market.  The need for skilled technicians and STEM workers will be clear and a catalyst for integrating MNT into your program.

Bio

Matthias Pleil Matthias Pleil, Ph.D. is the Principal Investigator for two National Science Foundation funded centers, the Southwest Center for Microsystems Education (SCME, since 2004) and the Support Center for Microsystems Education (2017). He is a Research Professor of Mechanical Engineering and the MTTC Cleanroom Manager at the University of New Mexico. He teaches several undergraduate engineering classes and promotes micro and nanotechnology. Previously he was a faculty member at Central New Mexico Community College in both the Schools of Applied Technologies and Math, Science and Engineering (MSE) where he taught Microsystems Fabrication and Design, Survey of Engineering and Physics. He has over 12 years of experience in Semiconductor Manufacturing from both Texas Instruments and Philips Semiconductors, where he worked as a Senior Process and Equipment Engineer and Engineering Manager in Photolithography, Yield, and Metrology. Dr. Pleil received his Ph.D. in Physics in 1993 from Texas Tech University, where he completed original research on Time-Resolved Fluorescence Spectroscopy.

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Researchers should cite this work as follows:

  • Matthias Pleil, The Micro Nano Technology - Education Center (2021), "What are MEMS and Why Do We Care?," https://nanohub.org/resources/35252.

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What are MEMS and Why Do We Care?
  • What Are MEMS? And Why Do We Care? 1. What Are MEMS? And Why Do We C… 0
    00:00/00:00
  • Presentation at a glance 2. Presentation at a glance 72.4391057724391
    00:00/00:00
  • What are Microsystems (MEMS)? 3. What are Microsystems (MEMS)? 90.090090090090087
    00:00/00:00
  • Comparison of Scale – Micro vs Nano 4. Comparison of Scale – Micro … 162.86286286286287
    00:00/00:00
  • Types of MEMS Devices 5. Types of MEMS Devices 228.52852852852854
    00:00/00:00
  • Where are MEMS Found? 6. Where are MEMS Found? 418.31831831831835
    00:00/00:00
  • Smart Phone Features Need MEMS 7. Smart Phone Features Need MEMS 546.21287954621289
    00:00/00:00
  • Sensors in Smartphones 8. Sensors in Smartphones 680.01334668001334
    00:00/00:00
  • MEMS in Smart Phones 9. MEMS in Smart Phones 803.06973640306978
    00:00/00:00
  • MEMS Combos – Multiple sensors in one package! 10. MEMS Combos – Multiple senso… 952.88621955288625
    00:00/00:00
  • MEMS Combos – Bosch Example 11. MEMS Combos – Bosch Example 1001.5015015015016
    00:00/00:00
  • Sensor Kinetics – See all your MEMS Sensors 12. Sensor Kinetics – See all yo… 1099.2992992992993
    00:00/00:00
  • For Homework 13. For Homework 1164.1307974641309
    00:00/00:00
  • MEMS Accelerometers 14. MEMS Accelerometers 1324.3910577243912
    00:00/00:00
  • Analog Devices Out of Plane Accelerometer 15. Analog Devices Out of Plane Ac… 1465.3653653653655
    00:00/00:00
  • In-Plane MEMS Accelerometers 16. In-Plane MEMS Accelerometers 1616.4164164164165
    00:00/00:00
  • iPhone 4 MEMS Accelerometers 17. iPhone 4 MEMS Accelerometers 1658.3917250583918
    00:00/00:00
  • Electrostatic Comb Drive Actuators 18. Electrostatic Comb Drive Actua… 1687.0203536870204
    00:00/00:00
  • Inertial MEMS in Automotive 19. Inertial MEMS in Automotive 1743.0430430430431
    00:00/00:00
  • Pressure Sensors 20. Pressure Sensors 1755.9225892559227
    00:00/00:00
  • Cantilever-based MEMS 21. Cantilever-based MEMS 1845.5455455455456
    00:00/00:00
  • Microactuators - Switches 22. Microactuators - Switches 1931.831831831832
    00:00/00:00
  • Micro-cantilever Chemical Sensor 23. Micro-cantilever Chemical Sens… 1956.4898231564898
    00:00/00:00
  • Cantilever Based Chemical Sensors 24. Cantilever Based Chemical Sens… 1988.5218551885218
    00:00/00:00
  • Nano Enables MEMS 25. Nano Enables MEMS 2015.7824491157826
    00:00/00:00
  • Chemical Sensor Arrays (CSAs) 26. Chemical Sensor Arrays (CSAs) 2083.8505171838506
    00:00/00:00
  • MEMS Enables Nano - Example 27. MEMS Enables Nano - Example 2126.6933600266934
    00:00/00:00
  • Chemical Sensor Arrays (CSAs) 28. Chemical Sensor Arrays (CSAs) 2145.3453453453453
    00:00/00:00
  • Cantilever capable of detecting changes in mass of 1 ag. Craighead Group/Cornell University, USA 29. Cantilever capable of detectin… 2189.9566232899565
    00:00/00:00
  • MEMS Cantilevers as Transducers Static or Dynamic modes of use 30. MEMS Cantilevers as Transducer… 2210.3770437103772
    00:00/00:00
  • What you can learn with cantilevers? 31. What you can learn with cantil… 2215.6156156156158
    00:00/00:00
  • MEMS Sensors – Bio Mimicry 32. MEMS Sensors – Bio Mimicry 2286.0860860860862
    00:00/00:00
  • Sensor Type 33. Sensor Type 2390.056723390057
    00:00/00:00
  • Microfluidics 34. Microfluidics 2405.3720387053722
    00:00/00:00
  • Printers 35. Printers 2415.7157157157158
    00:00/00:00
  • Micropumps 36. Micropumps 2455.4554554554556
    00:00/00:00
  • Micro-fluidics 37. Micro-fluidics 2481.6816816816818
    00:00/00:00
  • BioMEMS Applications 38. BioMEMS Applications 2535.6356356356359
    00:00/00:00
  • Biomedical Applications 39. Biomedical Applications 2537.8378378378379
    00:00/00:00
  • Therapeutics 40. Therapeutics 2615.3153153153153
    00:00/00:00
  • Micro-Needles 41. Micro-Needles 2740.4070737404072
    00:00/00:00
  • Drug Delivery – Insulin Delivery 42. Drug Delivery – Insulin Deli… 2749.8164831498166
    00:00/00:00
  • Drug Delivery – Nanopore Coated Stents 43. Drug Delivery – Nanopore Coa… 2797.4641307974643
    00:00/00:00
  • Drug Delivery – Liposome Vesicle 44. Drug Delivery – Liposome Ves… 2832.1654988321657
    00:00/00:00
  • Capsule Endoscopy 45. Capsule Endoscopy 2881.4481147814481
    00:00/00:00
  • Capsule Endoscopy 46. Capsule Endoscopy 2950.5171838505171
    00:00/00:00
  • Artificial Retinal Prosthesis 47. Artificial Retinal Prosthesis 2953.8538538538542
    00:00/00:00
  • Cochlear Implants 48. Cochlear Implants 2956.6232899566235
    00:00/00:00
  • Pacemakers 49. Pacemakers 3006.7067067067069
    00:00/00:00
  • Lab-on-a-chip (LOC) Concept 50. Lab-on-a-chip (LOC) Concept 3008.2749416082752
    00:00/00:00
  • Lab-on-a-chip (LOC) 51. Lab-on-a-chip (LOC) 3009.60960960961
    00:00/00:00
  • Biomarkers for Diagnostics 52. Biomarkers for Diagnostics 3019.2192192192192
    00:00/00:00
  • Micro-Optics 53. Micro-Optics 3027.1604938271607
    00:00/00:00
  • Micro-Optic Applications 54. Micro-Optic Applications 3049.5495495495497
    00:00/00:00
  • Digital Light Projection (DLP) 55. Digital Light Projection (DLP) 3066.4664664664665
    00:00/00:00
  • Micro-Optic Applications 56. Micro-Optic Applications 3086.3863863863867
    00:00/00:00
  • Digital Light Projection (DLP) 57. Digital Light Projection (DLP) 3103.1031031031034
    00:00/00:00
  • Untitled: Slide 55 58. Untitled: Slide 55 3129.8631965298632
    00:00/00:00
  • First Digital Movie 1999 59. First Digital Movie 1999 3157.3573573573576
    00:00/00:00
  • So… Why DO WE CARE? 60. So… Why DO WE CARE? 3194.9949949949951
    00:00/00:00
  • MEMS and sensors revenue market in B$ 61. MEMS and sensors revenue marke… 3286.21955288622
    00:00/00:00
  • Compounded Annual Growth Rate 62. Compounded Annual Growth Rate 3308.9089089089089
    00:00/00:00
  • Price/unit drops 63. Price/unit drops 3359.5261928595264
    00:00/00:00
  • Diving Deeper: Let's Look at sensors 64. Diving Deeper: Let's Look at s… 3377.5775775775778
    00:00/00:00
  • Sensors for mobile phones and tablets 65. Sensors for mobile phones and … 3379.77977977978
    00:00/00:00
  • IoT or IoE (Internet of Everything) From 15B sensors in 2015 to 1T in 2025 66. IoT or IoE (Internet of Everyt… 3402.96963630297
    00:00/00:00
  • 2020-2030+ Future Soldier Technologies 67. 2020-2030+ Future Soldier Tech… 3415.4154154154157
    00:00/00:00
  • Sensor Market for Automotive Will be driven by autonomous vehicles 68. Sensor Market for Automotive W… 3487.6876876876877
    00:00/00:00
  • Autonomous Cars 69. Autonomous Cars 3502.5025025025025
    00:00/00:00
  • Jobs follow cagr 70. Jobs follow cagr 3549.1157824491161
    00:00/00:00
  • SCME Professional Development Opportunities for You! 71. SCME Professional Development … 3582.5492158825496
    00:00/00:00
  • Learn more about the URE project 72. Learn more about the URE proje… 3649.6830163496829
    00:00/00:00
  • Interested in joining our community? 73. Interested in joining our comm… 3663.7303970637304
    00:00/00:00