Simulation Tools for Optimizing the Electrode Geometry of an In-Plane Unimorph Piezoelectric Microactuator

By Parker Megginson1; Wesley Lowman1; Jason Clark2; Ryan Clarson3

1. Auburn University 2. Oregon State University 3. oregon state university

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Abstract

This resource is intended to help piezoelectric unimorph designers in determining the ideal electrode width ratio for a given layer thickness. The reasoning behind the simulations and results are shown in a publication titled "Optimizing the Electrode Geometry of an In-Plane Unimorph Piezoelectric Microactuator for Maximum Deflection". The simulations that were performed in the paper were conducted in COMSOL Multiphysics software. The simulations were compiled to a stand-alone executable file so that anyone without a COMSOL license is able to run these simulations on their own hardware. Please select the file version that matches your operating system: Windows, MacOS, or Linux. The executable files for the simulations are included in the "Supporting Documents" section of this resource.

The Matlab .m script "unimorph_optimal_welec" can be used to determine the optimal electrode width given an specific overall width and height. To use this function, in the command window, type "welec = unimorph_optimal_welec(w, h)" where w is your total width and h is your total height.

The operating system requirements for the COMSOL standalone apps are as follows:

Windows:

  • Windows® 10
  • Windows® 10 Pro for Workstations
  • Windows® 8.1
  • Windows® 7 SP1
  • Windows Server® 2019
  • Windows Server® 2016
  • Windows Server® 2012 R2
  • Windows Server® 2012
  • Windows Server® 2008 R2 SP1
  • Windows HPC Server 2008 R2 SP1

MacOS:

  • macOS 10.13
  • macOS 10.14
  • macOS 10.15

Linux:

  • Debian® 8, 9, and 10
  • Red Hat® Enterprise Linux® 7.7 and 8.0
  • CentOS 7.7 and 8.0
  • Ubuntu® 16.04 and 18.04
  • SUSE® Linux Enterprise Desktop® 15 SP1
  • OpenSUSE® Leap 15.0 and 15.1
  • Oracle® Linux 8.2

 

The apps will be updated for newer versions of the operating systems as access becomes available.

Cite this work

Researchers should cite this work as follows:

  • Parker Megginson, Wesley Lowman, Jason Clark, Ryan Clarson (2023), "Simulation Tools for Optimizing the Electrode Geometry of an In-Plane Unimorph Piezoelectric Microactuator," https://nanohub.org/resources/38096.

    BibTex | EndNote

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