Vacuum Nanosystemsfor Energy Conversion
Online Presentations | 01 Feb 2013 | Contributor(s):: Roger T. Howe
Micro and nano-fabricated sensors (e.g., accelerometers and gyroscopes) and actuators (e.g., light valve chips for projection and cell-phone displays) have become commonplace in recent years. Some of these devices must operate in a hermetically sealed, lowpressure ambient, a need that motivated...