Courses (1-1 of 1)

1. ECE 695Q: Nanometer Scale Patterning and Processing

   11 Jul 2016 | | Contributor(s):: Minghao Qi

   This course is a top-down approach to the fabrication of nanometer-scale (<100nm) structures. Principles of lithography, film deposition, reactive-ion etch and planarization are presented. The couse provides a survey of state-of-the-art nanofabrication techniques.