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In the 20th century transistor performance improvement was driven by dimensional scaling; dimensional scaling in turn was driven by scaling of the wavelength of light used for patterning. However, in the last decade, new and innovative techniques have been used to drive transistor performance and dimensional scaling forward. This talk will focus on some of the techniques that have been used to enable Moore’s law over the last decade as well as the prognosis for future scaling.
Hyun Ku Lee onto favoir
09 Mar 2017