MEMS Resonators as an Enabling Technology
Online Presentations | 07 Aug 2019 | Contributor(s): Dana Weinstein
GHz CMOS-MEMS Resonators
Online Presentations | 05 Apr 2018 | Contributor(s): Dana Weinstein
Design and Compact Modeling of CMOS-MEMS Resonant Body Transistors
Online Presentations | 10 Jun 2014 | Contributor(s): Dana Weinstein, Luca Daniel, Bichoy W. Bahr
This talk presents the latest results of the CMOS Resonant Body Transistor (RBT) fabricated in standard 32nm SOI CMOS. Using phononic crystals formed from the CMOS stack, we will discuss methods for 10x improvement of Q and suppression of spurious modes.
RF Solid-State Vibrating Transistors
Online Presentations | 15 Feb 2014 | Contributor(s): Dana Weinstein
In this talk, I will discuss the Resonant Body Transistor (RBT), which can be integrated into a standard CMOS process. The first hybrid RF MEMS-CMOS resonators in Si at the transistor level of IBM’s SOI CMOS process, without any post-processing or packaging will be described. ...