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You are here: HomeResourcesOnline PresentationsMSE 376 Lecture 9: SPM Lithography, part 1About

MSE 376 Lecture 9: SPM Lithography, part 1

By Mark Hersam

Northwestern University

Category Online Presentations
Cite this work

Researchers should cite this work as follows:

  • Mark Hersam (2007), "MSE 376 Lecture 9: SPM Lithography, part 1," http://nanohub.org/resources/2517.

    BibTex | EndNote

Location Northwestern University, Evanston, IL
Tags
  1. course lecture
  2. lithography
  3. materials
  4. material science
  5. scanning probe microscopy

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